Glass substrate cassette positioning unit.
Cleanroom Positioning Stage

ILS Type (Patented)

■Overview
ILS Series positioning stages have been developed as buffers at each stage of glass substrate processing for simply positioning glass substrates buffer cassettes.

Since we have developed ILS stage units, there has been worldwide market demand for positioning cassettes especially the large types G7 and G8 mother glasses in FPD industries processing systems as well as the small types for updating existing processing systems. The ILS Series positioning stages upper plate rolls smoothly in any 360 degree direction. Despite their compactness, they also can carry heavy loads than conventional type and set the substrate cassette at a desired position. The cassettes are then unloaded by AGV to let the ILS upper plate return to its original position to load the next cassette. Instead of returning the upper plate of ILS stage unit to its original position, an S type is also available to hold the stage at an unloading position.

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ILS-150

ILS-150
Product Weight : 1.5kg
Moving Distance : ±15mm
Load Capacity : Aluminum+Alumite
Case : Aluminum+Alumite
Fixing Flange : Aluminum+Alumite
Moving Stage : SUS304

 

Draft:ILS-150

ILS-150S

ILS-150S
Product Weight : 1.8kg
Moving Distance : ±15mm
Load Capacity : 150kgf
Recommended Air Pressure :
0.2MPa (2 kgf/cm^2)
Case : Aluminum+Alumite
Fixing Flange : Aluminum+Alumite
Moving Stage : SUS304

 

Draft:ILS-150S

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